发明名称 Polystyrene as a resist for making patterned media
摘要 A system and method for forming servo patterns on magnetic media is disclosed. A magnetic film coated with a layer of polystyrene is stamped with a nickel stamper reproducing the negative image of the stamped pattern on the polystyrene. Ions are then accelerated towards the surface of the polystyrene, which stopps the ions in the areas where the polystyrene is thick and allows the ions to penetrate through to the magnetic layer in the areas where the polystyrene is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped polystyrene pattern on the magnetic layer. The polystyrene is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic media.
申请公布号 US6838227(B2) 申请公布日期 2005.01.04
申请号 US20020112214 申请日期 2002.03.29
申请人 SEAGATE TECHNOLOGY LLC 发明人 WANG HONGYING;DEEMAN NEIL;WAGO KOICHI;KURATAKA NOBUO
分类号 G03F7/00;G11B5/74;G11B5/82;G11B5/855;(IPC1-7):G03C5/00;B05D5/12;B32B13/04 主分类号 G03F7/00
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