METHOD OF ETCHING,申请号KR20047015177-传众专利搜索

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发明名称	METHOD OF ETCHING
摘要
申请公布号	KR20040111437(A)	申请公布日期	2004.12.31
申请号	KR20047015177	申请日期	2003.03.26
申请人		发明人
分类号	H01L21/3065;H01L21/302;H01L21/31;H01L21/311;H01L21/32;H01L21/461	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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