MANUFACTURING EQUIPMENT OF SEMICONDUCTOR DEVICE HAVING MORE THAN ONE TEMPERATURE ADJUSTORS FOR REDUCING TEMPERATURE VARIATION ON WIDE SEMICONDUCTOR WAFER

摘要

PURPOSE: A manufacturing equipment of a semiconductor device having more than one temperature controller is provided to reduce a temperature variation on a wide semiconductor wafer. CONSTITUTION: A manufacturing equipment of a semiconductor device having more than one temperature controllers includes an electrostatic chuck(100), a first temperature controller(120), and a second temperature controller(130). The first temperature controller is implemented on the electrostatic chuck. The second temperature controller is also implemented on the electrostatic chuck.