Optical deflection apparatus and manufacturing method thereof, optical deflection array, imaging apparatus, and image projection display apparatus

摘要

A miniaturized and highly integrated optical deflection apparatus is realized in which the number of electrodes for driving the optical deflection apparatus is reduced. The optical deflection apparatus implements a sheet member that is electrically floating and plural electrodes that are implemented on a substrate. The sheet member includes a member having a light reflection region and an electret member that is charged at a predetermined electric potential. The sheet member is tilted by applying an electric potential that is substantially equivalent to an electric potential of the electret member to one of the electrodes and applying a ground potential to another one of the electrodes.