MEMs variable optical attenuator having movable optical waveguide and method for operating movable optical waveguide

摘要

Disclosed is a MEMS variable optical attenuator. The MEMS variable optical attenuator comprises a substrate having a flat upper surface; optical transmitting and receiving terminals arranged on the upper surface of the substrate; a movable optical waveguide arranged at a location such that it attenuates the maximum amount of light transmitted between the optical transmitting and receiving terminals; a micro actuator arranged on the substrate for moving the movable optical waveguide; and a voltage supply unit for supplying driving voltage to the micro actuator, wherein the micro actuator moves the movable optical waveguide so that the light attenuation amount is decreased in accordance with the increase in the driving voltage supplied from the voltage supply unit.