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发明名称
EXPOSURE APPARATUS AND EXPOSURE METHOD CAPABLE OF CONTROLLING ILLUMINATION DISTRIBUTION
摘要
申请公布号
SG107560(A1)
申请公布日期
2004.12.29
申请号
SG20010001071
申请日期
2001.02.23
申请人
NIKON CORPORATION
发明人
HISASHI NISHINAGA
分类号
H01L21/027;G03B27/42;G03F7/20;(IPC1-7):G03F7/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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