发明名称 |
Method of making substrate with micro-protrusions or micro-cavities |
摘要 |
A slider prevent the phenomenon of sticking and reduce entrapping of foreign particles between sliding surfaces. A method for making micro-protrusions or micro-cavities on a surface of a substrate comprises placing the substrate in a process chamber, supporting a mask member having a micro shielding surface independent of and in front of the substrate, and irradiating fast atomic beams onto the surface of the substrate through the mask member.
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申请公布号 |
US6835317(B2) |
申请公布日期 |
2004.12.28 |
申请号 |
US20010941692 |
申请日期 |
2001.08.30 |
申请人 |
EBARA CORPORATION;HATAMURA YOTARO |
发明人 |
HATAMURA YOTARO;NAKAO MASAYUKI |
分类号 |
G11B5/10;G11B5/82;(IPC1-7):G11B5/127 |
主分类号 |
G11B5/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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