APPARATUS WITH CLEANING PART CAPABLE OF KEEPING STYLUS CLEAN USED FOR MEASURING STEPPED PORTION OF SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus for measuring a stepped portion of a semiconductor device is provided to prolong the lifetime of a stylus and to secure reliable data when measuring the stepped portion by keeping the stylus clean using a cleaning part. CONSTITUTION: An apparatus includes a stylus, a stylus assembly, a stage, a support member and a cleaning part. The stylus(400) generates an electric signal corresponding to a stepped portion of an object to be measured. The stylus assembly(420) moves and supports the stylus. The stage is used for supporting the object to be measured. The support member(430) is connected with an external portion of the stage. The cleaning part(440) is located on the support member. The cleaning part is used for cleaning a contact portion(400b) of the stylus.