| 发明名称 |
FOCUSED ION BEAM MICROLATHE |
| 摘要 |
An apparatus for customizing focused ion beam (FIB) probes is described. Prior to taking probe measurements, the probe tips are milled with a beam of gallium ions on a microlathe platform. A motor rotates the probes such that the probe tips are uniformly milled.
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| 申请公布号 |
US2004256577(A1) |
申请公布日期 |
2004.12.23 |
| 申请号 |
US20030465776 |
申请日期 |
2003.06.18 |
| 申请人 |
STEVENS MARY B.;ZWIGL PETER |
发明人 |
STEVENS MARY B.;ZWIGL PETER |
| 分类号 |
G21G5/00;H01J37/20;H01J37/305;H01J37/31;(IPC1-7):H01J37/31 |
主分类号 |
G21G5/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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