MULTILAYER METAL LINE ALIGNMENT KEY STRUCTURE FOR REDUCING ALIGNMENT-TIME AND SECURING RELIABILITY OF ALIGNING PROCESS

摘要

PURPOSE: A multilayer metal line alignment key structure is provided to reduce alignment-time and to secure the reliability of an aligning process by using a plurality of alignment keys with the same shape formed on the same vertical line of a scribe lane. CONSTITUTION: An alignment key structure(310) includes a first to third alignment key(311,312,313). Each metal line layer and a corresponding alignment key are simultaneously formed in an interlayer dielectric. The first to third alignment keys have the same shape regardless of the shape of the metal line layer. The first to third alignment keys are arranged on the same vertical line of a scribe lane.