| 摘要 |
PURPOSE:To permit direct and free observation of a solid-liquid boundary and the condition of a crystal and melt and early discovery of abnormality, etc., and to obtain the single crystal at a high yield by providing a prism for observation, etc., to the bottom end of a pulling up shaft of a crystal pulling up device in parallel therewith and penetrating a specific pipe installed with an observing means into the top end in the upper part. CONSTITUTION:The pipe 11 is provided rotatably and vertically movably cooperatively with a driving device 12 on the outside of a furnace through the ceiling of a crystallization furnace wall 1 in parallel with the pulling up shaft 3 which pulls up the grown crystal 7 from a crucible 2 contg. the melt of a raw material 6 and liquid sealant 8 of the crystal pulling up device. The prism 14 (or reflection mirror) made of quartz or supphire for observing the crystal growth is provided to the bottom end of the pipe 11 and the prism 14 or if necessary, a reflection mirror 15 is mounted to the top end as well. The observing means 13 such as video camera or radiation thermometer is disposed oppositely thereto. The desired part such as the solid-liquid boundary, the side part or upper part of the puled up crystal or the condition of the melt is freely directly observed to discover twins, polycrystals or other abnormalities in an early period. The crystal is grown under the control in the above-mentioned manner.
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