发明名称 |
Method and apparatus for APC solver engine and heuristic |
摘要 |
Systems and methodologies are provided that adapt and control desired fabrication processes by utilizing a control model based solution. A suitable control model is obtained or derived from one or more other control models. A formulaic description is then obtained that predicts one or more desired outputs based on various process settings and inputs. A suitable solution to the description that achieves the desired outputs and is relatively close to ideal processing conditions is obtained utilizing a heuristic. The solution includes process control parameters or settings that are employed to control and/or modify a fabrication process.
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申请公布号 |
US6834212(B1) |
申请公布日期 |
2004.12.21 |
申请号 |
US20020189931 |
申请日期 |
2002.07.03 |
申请人 |
BLUE CONTROL TECHNOLOGIES, INC. |
发明人 |
PATEL SUKESH;FREELAND MARK |
分类号 |
G05B13/04;G06F19/00;(IPC1-7):G06F19/00 |
主分类号 |
G05B13/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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