| 摘要 |
PROBLEM TO BE SOLVED: To provide a composition of resist remover for removing so-called polymers such as a residual modified resist, an embedding material and an etching residue, while suppressing corrosion of metal lines such as copper or an insulating film such as a low-k film, in particular, for an electronic board having metal wires, and to provide a method of manufacturing an electronic board by using the composition of resist remover. SOLUTION: The resist remover composition contains a water-soluble amine and/or an ammonium compound, and an oxidizing agent, a radical scavenger and water. The method of manufacturing an electronic board is carried out by using the composition of the resist remover. COPYRIGHT: (C)2005,JPO&NCIPI |
