ELECTROMAGNETIC WAVE SHIELDING MEMBER, ELECTROMAGNETIC WAVE SHIELDING METHOD, AND SUBSTRATE PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an electromagnetic wave shielding member having excellent electromagnetic wave shielding performance and suppressing propagation of vibration without making the apparatus and control complicated, and to provide an electromagnetic wave shielding method and a substrate processing system. SOLUTION: The electromagnetic wave shielding member 70 comprises a conductive first bracket 72 having a base plate part 80 and a bent plate part 82, and a conductive second bracket 74 having a base plate part 88. The base plate part 80 of the first bracket 72 is provided with slots 84 and the bent plate part 82 is provided with screw holes 86. The base plate part 88 of the second bracket 74 is provided with slots 94. The edge part of the second bracket 74 is provided with an elastic and conductive gasket 76. A male screw 78 is screwed in the screw hole 86 formed in the bent plate part 82 of the first bracket 72 through the slot 94 formed in the base plate part 88 of the second bracket 74 to join the first and second brackets 72, 74. COPYRIGHT: (C)2005,JPO&NCIPI