| 摘要 |
PROBLEM TO BE SOLVED: To prevent breakage of a heating object supporting member even if heating and cooling of a heating plate are repeated by relaxing a heat stress generated due to a temperature difference between the lower end part of the heating object supporting member 1 and the heating plate 2 in heating the heating plate 2. SOLUTION: This is an electron bombardment heating device in which the heat is generated at the heating plate 2 by accelerating thermoelectrons generated at a filament 9 and colliding it with the heating plate 2, a surrounding wall of the heating object supporting member 1 in which the heating plate 2 is made as a ceiling wall is composed of upper and lower multi-staged surrounding wall parts 13a, 13b different in diameters, and these surrounding wall parts 13a, 13b are coupled by a ring-shape lateral wall 15 which extends in their diameter direction. Because of this, in the electron bombardment heating device, since the heat stress accompanied with temperature changes is dispersed by the multi-staged surrounding wall parts 13a, 13b of the heating object supporting member 1 and the lateral wall 15, fatigue fracture due to the heat stress generated by repetition of heating and cooling hardly occurs. COPYRIGHT: (C)2005,JPO&NCIPI
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