OPTICAL COMPONENT AND DEVICE FOR IRRADIATING WITH LASER BEAM

摘要

PROBLEM TO BE SOLVED: To provide a device for irradiating with laser beam capable of preventing the interference between an incident beam and a reflected beam from the rear surface of a substrate to be treated and suppressing the damage to an optical component due to the reflected beam, and to provide an optical component used for the device for irradiating with laser beam. SOLUTION: The optical component for fixing a lens is composed of a base part, a retaining fixture and a clamping fixture. The base part comprises a side surface of recessed shape having a curved part and a plurality of first insertion holes. The retaining fixture is cylindrical and has a second insertion hole penetrating a center part of at least one surface of upper and lower surfaces. The lens is held between one part of the part which is extended from the edge of the side surface to the inside thereof in the base part and corresponds to the inside of a circle when plotting the circle circumscribing all of the insertion holes and the retaining fixture. The base part and the retaining fixture are clamped by the clamping fixture which is inserted to the first insertion hole and the second insertion hole. COPYRIGHT: (C)2005,JPO&NCIPI