| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic diagnosis probe apparatus wherein an ultrasonic transducer disposed in an ultrasonic probe is made without containing lead and is prevented to have a dispersion in performance efficiency. SOLUTION: The ultrasonic transducer is an electrostatic type ultrasonic transducer (hereafter, also described as c-MUT31) 31 and is manufactured by a silicone process automatically. The c-MUT31 is formed of an array of two or more c-MUT cells 31a. The two or more c-MUT cells 31a and 31a are disposed in an array of two or more rows and two or more lines with prescribed micropitches. The c-MUT cell 31a is constituted mainly with a bottom electrode 37d which is an electrode to receive a signal, a silicone membrane 38 and an upper electrode 37u which is a grounding electrode, formed on a silicone substrate 35, wherein a vacuum vacant space part 40 is a braking layer of the silicone membrane 38. The silicone substrate 35 on which the two or more c-MUT cells 31a are arrayed is disposed with an access circuit forming part 43 and a wiring electrode 44. COPYRIGHT: (C)2005,JPO&NCIPI |
