发明名称 |
System and method for electronically collecting data in a fabrication facility |
摘要 |
The present invention is a system for electronically collecting data in a process line in a semiconductor or data storage fabrication facility. The system includes a data collection processing unit configured to sniff data packets transmitted over a LAN between a plurality of tools in the fabrication facility. The data collection processing unit is further configured to determine if the sniffed data packets are valid data packets based on a configuration file established for the plurality of tools. The data collection processing unit is further configured to parse one or more data fragments from the valid data packets.
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申请公布号 |
US2004255024(A1) |
申请公布日期 |
2004.12.16 |
申请号 |
US20030460915 |
申请日期 |
2003.06.12 |
申请人 |
JONES RONALD A.;LONGACRE JEFFREY |
发明人 |
JONES RONALD A.;LONGACRE JEFFREY |
分类号 |
H01L21/66;(IPC1-7):G06F15/173 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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