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发明名称
BURNER MANIFOLD APPARATUS FOR USE IN A CHEMICAL VAPOR DEPOSITION PROCESS
摘要
申请公布号
EP1144913(A4)
申请公布日期
2004.12.15
申请号
EP19990965064
申请日期
1999.12.01
申请人
CORNING INCORPORATED
发明人
DAWSON-ELLI, DAVID, F.;FU, XIAODONG;HAWTOF, DANIEL, W.;KIEFER, WILLIAM, J.;STONE, JOHN, III;WIGHT, JOHN, F., JR.
分类号
F23D14/14;C03B19/06;C03B19/14;C03B23/047;C03B37/014;C23C16/453;C23C16/455;F23D14/22;F23D14/52;F23D14/56;F23D14/58;(IPC1-7):F23D14/14
主分类号
F23D14/14
代理机构
代理人
主权项
地址
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