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经营范围
发明名称
THIN FILM RESISTORS WHOSE SURFACE RESISTANCE VALUES ARE COMPRISED BETWEEN 1M-OHMS AND SEVERAL G-OHMS AND PROCESS OF MAKING IT
摘要
申请公布号
EP0405304(A3)
申请公布日期
1992.06.03
申请号
EP19900111587
申请日期
1990.06.19
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
HOHEISEL, MARTIN, DR.;MROTZEK, CHRISTINE;MUELLER, WERNER
分类号
C23C14/34;C23C14/08;C23C14/24;H01C7/00;H01C17/08;H01C17/12;H01L27/13;(IPC1-7):H01C7/00
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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