Electronic device and method of manufacturing thereof

摘要

The electronic device comprises a substrate (1) with a cavity (6) in which an active device (8) is present. At the first side (2) of the substrate (1) an interconnect structure (17) extends over the cavity (6) and the substrate (1). At the second side (3) of the substrate (1), to which the cavity (6) extends a heat sink (23) is available. The device is particularly suitable for use at high frequencies, for instance higher than 2 GHz and under conditions of high dissipation.