| 摘要 |
<p>PURPOSE:To prevent the peeling and the scattering of a defective pellet of the outer circumference of a sticking wafer on an adhensive sheet. CONSTITUTION:A light shielding plate 15 is arranged in the vicinity of the lower surface of an adhesive sheet 4, and the ultraviolet ray from an ultraviolet ray generating source 7 which are sent forth on a region 13 of imperfect outer shape of a pellet is shielded. The ultraviolet ray from the ultraviolet ray generating source 7 which are sent forth on a perfect region 13 is shielded. The light shielding plate 15 is constituted of a pair of planar light shielding members which are faced with each other so as to be movable. Thereby the light shielding region can be changed.</p> |
