| 摘要 |
PROBLEM TO BE SOLVED: To provide a visual inspection method and device for eliminating the need of the exact positioning for a master pattern, for eliminating erroneous determination of determining a nondefective as a defective, and for restraining an increase of the kinds of reference pattern portions prepared as the master pattern. SOLUTION: In this method and device, appearances of inspection areas 16a-16i having repeated patterns are inspected based on comparison with the prescribed master pattern. The inspection areas 16a-16i are partitioned into a plurality of vertical and lateral visual field areas, and reference pattern portions 17a-17i different each other including respective edge shapes a difference by a difference of the edge shapes of the inspection areas 16a-16i included in the respective partitioned visual field areas are used as the master pattern 17. COPYRIGHT: (C)2005,JPO&NCIPI
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