| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element controller with the sensitivity of its sensor on minute displacement kept constant independently of the displacement amount Z of a piezoelectric element and used for high accuracy control even for minute displacement. SOLUTION: This piezoelectric element controller is equipped with a piezoelectric element 20 having first and second electrodes and displaced by an electric field placed between the first and second electrodes, drive circuits 14, 15, and 16, connected to the first electrode of the element 20 and outputting voltage signals to place the electric field between the first and second electrodes, an electric charge detection circuit 30 connected to the second electrode of the element 20 to detect the amount of electric charge stored in the element 20, and a correction circuit 40 for outputting a corrective value by performing calculation for correcting an output of the detection circuit 30 based on the outputs of the drive circuits 14, 15 and 16, and on the output of the detection circuit 30. COPYRIGHT: (C)2005,JPO&NCIPI
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