MICRODEFECT INSPECTION APPARATUS AND METHOD FOR MANUFACTURING CIRCUIT BOARD

摘要

PROBLEM TO BE SOLVED: To provide a microdefect inspection apparatus for eliminating an enhancement of its optical performance and resolution and detecting microdefects on an inspected object at higher resolution (detecting the microdefects smaller than a focus diameter of an inspecting illumination light). SOLUTION: The microdefect inspection apparatus has a light source for vertically irradiating the inspected object with coherent microlight, a Fourier transform optical system for Fourier-transforming a reflection light from the inspected object, a light detection means for detecting a light quantity distribution of a Fourier-transformed optical pattern created on a Fourier transform plane by the Fourier-transformed reflection light and a defect detection means for detecting the microdefects on the inspected object from the light quantity distribution of the Fourier-transformed optical pattern. COPYRIGHT: (C)2005,JPO&NCIPI