| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater for coating a work with viscous fluid, which hardly causes the dripping off of the viscous fluid and which realizes high speed and stable coating of the viscous fluid at a low cost by shortening a transfer time. SOLUTION: This coater has a coating head 3 for coating the work 2 with the viscous liquid A, an XY positioning mechanism 4 for positioning in the horizontal direction of the coating head 3 relative to the work 2, and a height direction positioning mechanism 5 for positioning in the height direction of the the coating head 3 relative to the work 2. In the process for coating the work 2 with the viscous liquid A after positioning the coating head A and the work at a prescribed distance, the coating is performed by finely vibrating the coating head 3 by using the height direction positioning mechanism 5 or the XY positioning mechanism 4. COPYRIGHT: (C)2005,JPO&NCIPI
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