| 摘要 |
PROBLEM TO BE SOLVED: To provide a support device of an optical element which stably holds and harden such damping member as a gel and surely gives a desired fluid damping effect. SOLUTION: In the support device of an optical element having at least a hold member 21 which holds the optical element 1 and a support member 23 which supports the hold part 21 movably with respect to a fixed part 22, a gap is formed at least by the support member 23 along the support member 23 in the vicinity of the hold member 21 side of the support member 23 or in the vicinity of the fixed part 22 side, a damping member 39 is provided to connect the gap, and a narrow width part 23t is formed to make the width of the gap in the gap region in which the damping member 39 is provided. COPYRIGHT: (C)2005,JPO&NCIPI |
