| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro device and a method of manufacturing the micro device, in which the optical path is switched with a function plane at low loss by preventing the rough surface of the function plane caused by a smoothening process. SOLUTION: A function element 26 is composed by providing protection members 31A and 31B having a projected part F on both ends of a function part 26 on which the function planes 26a and 26b are formed, and recessed corner parts B through E are formed on both ends of the function planes 26a and 26b. The function element 26 is smoothened by a crystal anisotropic etching. COPYRIGHT: (C)2005,JPO&NCIPI |
