| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet-fed type spin liquid processing apparatus which can perform a process liquid supply work and a mist removing work in parallel simultaneously and which can capture fine mist of a wider space area to wash away minute mist soared by ascending air current generated by the rotation of a spin chuck by utilizing the air current. SOLUTION: The sheet-fed type spin liquid processing apparatus 101 includes a vortex flow generating mechanism 103 provided in an upper part in a chamber 12 for generating a vortex flow 102 for washing away the minute mist 6b floating above in the chamber 12 by entraining the minute mist 6b, and a vortex flow exhaust port 104 disposed oppositely to the vortex flow generating mechanism 103 to exhaust the vortex flow 102 entraining the minute mist 6b. COPYRIGHT: (C)2005,JPO&NCIPI
|
