发明名称 |
Method for manufacturing metal microstructure |
摘要 |
A method of manufacturing a metal microstructure by using a resin mold. In order to provide a method in which a mild manufacturing condition which causes less damage to the resin mold can be set and the high-precision metal microstructure can be mass-produced by uniform electroforming, the method of manufacturing the metal microstructure according to the present invention includes the steps of: fixing on a conductive substrate the resin mold having a vacant portion penetrating in the direction of thickness, by interposing a photosensitive polymer having a chemical composition changed by an electron beam, ultraviolet radiation or visible radiation so as to form a layered structure having the resin mold; exposing the layered structure having the resin mold to an electron beam, ultraviolet radiation or visible radiation; removing an exposed photosensitive polymer existing at the vacant portion of the resin mold; and filling with a metal the vacant portion of the layered structure having the resin mold by electroforming.
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申请公布号 |
US2004248421(A1) |
申请公布日期 |
2004.12.09 |
申请号 |
US20040492918 |
申请日期 |
2004.04.16 |
申请人 |
YORITA JUN;HIRATA YOSHIHIRO;HAGA TSUYOSHI |
发明人 |
YORITA JUN;HIRATA YOSHIHIRO;HAGA TSUYOSHI |
分类号 |
B81C1/00;C25D1/00;H01L21/48;H05K3/20;(IPC1-7):H01L21/302;H01L21/461 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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