| 摘要 |
PROBLEM TO BE SOLVED: To provide an observation apparatus capable of acquiring an image of an observation point of a sample in an always clear state. SOLUTION: This observation apparatus has: generation means 15, 18 generating an image signal related to a partial area of the sample 10A; movement means 12, 13, 17, 23 moving the partial area to the predetermined observation point of the sample; a detection means 23 detecting timing wherein fluctuation of the image signal caused by arrival of the partial area at the observation point converges; and acquisition means 23 acquiring the image signal as the image of the observation point after the detection means detects the convergence of the fluctuation. COPYRIGHT: (C)2005,JPO&NCIPI
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