CHIP PART CONVEYANCE METHOD, ITS DEVICE, APPEARANCE INSPECTION METHOD, AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To perform stable conveyance at workpiece (a chip part) attitude by a first rotary disc and a second rotary disc, stabilize transfer operation by improving transfer of workpieces between the first and second rotary discs, and improve and stabilize inspection precision of appearance inspection of the chip part by utilizing it. SOLUTION: A mechanism for conveying the chip part by sucking and holding it on a vertical face of the second rotary disc 20 after supporting and conveying the chip part on a horizontal face by the first rotary disc 10 is used. An upper face of the chip part is imaged by a first camera C1, and a side face on one side of the chip part is imaged by a second camera C2 while conveying the chip part 1 by the first rotary disc 10. A lower face of the chip part is imaged by a third camera C3, and a side face on the other side of the chip part is imaged by a fourth camera C4 while conveying the chip part by the second rotary disc 20. COPYRIGHT: (C)2005,JPO&NCIPI