STORAGE CARRIER FOR CLEANING OF WAFER

摘要

PROBLEM TO BE SOLVED: To provide a storage carrier for cleaning of a wafer of such structure that dummy wafers can not be drawn out easily so as to prevent the dummy wafers from mixing in product wafers. SOLUTION: An orientation flat part 11 is erected vertically in the storage groove 3 for accommodating a dummy carrier 10 in a storage carrier 1, and a dummy wafer 10 is inserted therein. Then, the dummy wafer 10 is rotated about 90 deg. so as to turn the orientation flat toward the open face of the storage carrier 1. The dummy wafer 10 is disabled to be drawn out because the width of the carrier groove in the diametrical direction of the wafer of the storage groove 3 is narrow by the difference between the diameter of the wafer and the diameter of the orientation flat part in the presence of a projection 5.