DEVICE FOR ACTIVATING GASES IN A VACUUM

摘要

The invention relates to a device for activating a gas that traverses said device using a hollow cathode glow discharge. Said device consists of a housing provided with at least one gas feed and at least one opening for discharging the gas, a hollow cathode, in addition to an inner chamber that is delimited by the housing and contains an anode. The dimensions of the opening or openings for discharging the gas in relation to the wall thickness of the hollow cathode are chosen in such a way that the hollow cathode glow discharge is confined to the inner chamber.