BIDIRECTIONAL HIGH VOLTAGE PULSE POWER SUPPLY INCLUDING PRE-REGULATOR, VOLTAGE CONTROLLER, DC LINK CAPACITOR, TRANSFORMER, PUSH-PULL CONVERTER, SECONDARY SIDE CAPACITOR, ROD MATCHING UNIT, SEMICONDUCTOR SWITCHING MODULE, AND PULSE REPEATING RATIO/WIDTH CONTROLLER

摘要

PURPOSE: A bidirectional high voltage pulse power supply is provided to simplify a circuit configuration, and achieve improved efficiency by regenerating energy to a DC link capacitor through a resonance. CONSTITUTION: A bidirectional high voltage pulse power supply comprises a pre-regulator(10) for receiving three-phase input voltage and performing a phase control rectification; a voltage controller for controlling the phase control rectification of the pre-regulator; a DC link capacitor(20) connected in parallel to an output terminal of the pre-regulator; a transformer(40) having a primary side coil connected in parallel to the DC link capacitor; a push-pull converter(30) constituted by a push-pull switch connected in serial to the primary side coil of the transformer; a secondary side capacitor connected in parallel to a secondary side coil of the transformer; a rod matching unit(70) connected in parallel to an output terminal; a semiconductor switching module; and a pulse repeating ratio/width controller. The semiconductor switching module is interposed between an end of the secondary side capacitor and an end of the rod matching unit, and transmits the energy stored in the secondary side capacitor to an output terminal, in the type of bidirectional output pulse voltage. The pulse repeating ratio/width controller controls the semiconductor switching module and the push-pull converter so as to adjust the repeating ratio and width of the bidirectional output pulse.