| 摘要 |
The manufacturing method of a flat panel display comprises facing a faceplate, which has a phosphor screen, to a rear plate, which has an electron emitting element, with a predetermined gap, and joining. At least one of a rear plate (20) and a faceplate (10) is accommodated in an electron beam cleaning chamber (42, 46), and, an electron beam (53) is irradiated onto the rear plate (20) or the faceplate (10) from an electron beam generator (52), which is disposed in the electron beam cleaning chamber (42, 46), in a vacuum atmosphere. Thereby, a surface adsorbed gas is sufficiently degassed. Thus, by sufficiently degassing the surface adsorbed gas in the display, the inside of a vacuum vessel as an envelope can be maintained in a high vacuum state.
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