发明名称 Multi-layered interconnect structure using liquid crystalline polymer dielectric
摘要 A multi-layered interconnect structure and method of formation. In a first embodiment, first and second liquid crystal polymer (LCP) dielectric layers are directly bonded, respectively, to first and second opposing surface of a thermally conductive layer, with no extrinsic adhesive material bonding the thermally conductive layer with either the first or second LCP dielectric layer. In a second embodiment, first and second 2S1P substructures are directly bonded, respectively, to first and second opposing surfaces of a LCP dielectric joining layer, with no extrinsic adhesive material bonding the LCP dielectric joining layer with either the first or second 2S1P substructures.
申请公布号 US6826830(B2) 申请公布日期 2004.12.07
申请号 US20020263849 申请日期 2002.10.03
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 EGITTO FRANK D.;FARQUHAR DONALD S.;MARKOVICH VOYA R.;POLIKS MARK D.;POWELL DOUGLAS O.
分类号 H01L23/12;G02F1/1347;H01L21/48;H01L23/373;H05K3/46;(IPC1-7):H01K3/10 主分类号 H01L23/12
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