发明名称
摘要 A material with a low volume resistivity at room temperature composed of an aluminum nitride sintered body is provided. The sintered body contains samarium in a converted content calculated as samarium oxide of not lower than 0.04 mole percent, and the sintered body contains aluminum nitride phase and samarium-aluminum complex oxide phase. The samarium-aluminum complex oxide phase forms intergranular layers with a low resistivity along the intergranular phase between aluminum nitride grains.
申请公布号 KR100459296(B1) 申请公布日期 2004.12.03
申请号 KR20010065018 申请日期 2001.10.22
申请人 发明人
分类号 H01L21/00;C04B35/581;H01L21/683 主分类号 H01L21/00
代理机构 代理人
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