Negative resist material and method for forming resist pattern

摘要

Disclosed is a negative-working resist material comprising a polymeric compound having a polymerizable unit comprising at least a hydroxy acid moiety and a main chain moiety bound to each other via only one carbon in the carbon skeleton of the hydroxy acid, wherein a space of such size as to permit an alkali substance to approach a linkage between the hydroxy acid moiety and the main chain moiety is not present between the two moieties. The material can be used as a negative-working resist material containing the polymeric compound and an acid generating agent, which is easily synthesized and excellent in shelf stability and processing stability upon alkali treatment.