| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new projection optical system which has a high NA and is excellent in throughput and optical performances, such as resolution and the like. <P>SOLUTION: The projection optical system projects a pattern located on a first plane onto a second plane and has an NA of 0.85 or above. The projection optical system is equipped with an optical member provided with an antireflection film which is composed of a plurality of layers, and the refractive index of the final layer of the above layers is tan äsin<SP>-1</SP>(NA)} or above. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
