| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable inspection of displacement of IL (inner lead) resulting from expansion and compression of base material of tape. <P>SOLUTION: The taper carrier fault inspection apparatus comprises means for: (S61) inputting a pattern to be inspected obtained by taking a picture of the tape carrier as the inspection object with a camera; (S65, S67) for detecting the length of the predetermined area of the tape carrier in the IL line setting direction for the inspection pattern to be inspected; (S69) calculating a ratio of the length of the predetermined area in the inspection pattern to the length of the predetermined area in the reference master pattern, (S65, S70, S71) detecting distance for each IL in the IL line setting direction for the inspection pattern; and (S72) compensating for the distance in the above ratio or the like. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
