PRECURSORS OF GROUP IV TRANSITION METAL OXIDE AND PREPARING METHOD THEREOF

摘要

PURPOSE: Precursors of group IV transition metal oxide and a preparing method thereof are provided, which precursors are easily stored due to its less sensitivity to water, and has improved volatility, so that they are useful as precursors for production of an oxide thin layer. CONSTITUTION: The precursors of group IV transition metal oxide represented by formula (1) of M(OCR2(CH2)mY)x(NR'2)(4-x), is provided, wherein M is titanium, zirconium or hafnium; R is optionally fluor containing C1-C4 alkyl; Y is -OR' or -NR'2 in which R' is C1-C4 alkyl or C1-C4 alkylsilyl; m is an integer from 1 to 3; and x is an integer from 1 to 4. The method for preparing the precursors of group IV transition metal oxide of formula (1) comprises reacting group IV transition metal complex of formula (2) of M(NR'2)4, with an alcohol compound of formula (3) of HOCR2(CH2)mY.