| 摘要 |
PROBLEM TO BE SOLVED: To perform a surface treatment such as surface washing and surface processing by dry processing, giving minimum damage to the crystalline structure of the surface of the crystalline optical materials of which crystalline structure reflects optical characteristics. SOLUTION: The method for manufacturing a crystalline optical element, has the step of the surface treatment of the crystalline optical materials is carried out at a temperature lower than the temperature that prevents damage which occurs at the time of surface treatment from being propagated to the inside of the crystalline optical materials, in a surface treatment method for the crystalline optical materials using a particle beam and plasma. COPYRIGHT: (C)2005,JPO&NCIPI
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