Tester and testing method

摘要

Disclosed is an inspection apparatus and method for inspecting a circuit wiring on a circuit board. An inspection signal is supplied to the circuit wiring on the circuit board (S 141), and potential variation generated in a specific region of the circuit wiring in response to the inspection signal is detected using a plurality of sensor elements (S 142) to create image data representing the shape of the circuit wiring (S 151 and subsequent Steps). The shape of the circuit wiring is compared with a corresponding pre-registered standard shape (S 167) to check the state of the circuit wiring (S 168, S 169). The inspection apparatus and method of the present invention can reliably inspect the state of a circuit wiring with a high degree of accuracy.