摘要 |
PROBLEM TO BE SOLVED: To provide a droplet discharging apparatus which is simple in constitution and can form a high-precision pattern on a work such as a substrate. SOLUTION: In the apparatus, a group 3 of discharge heads with nozzles for discharging droplets to a glass substrate 5 mounted on a stage 4 are provided, the quantity of the positional displacement of the glass substrate 5 is calculated from the alignment mark 21 of the glass substrate 5 acquired by an imaging device 12, and discharge data with the number of data corresponding to the displacement quantity shifted are prepared to control the discharge of the droplets from the nozzles. COPYRIGHT: (C)2005,JPO&NCIPI
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