发明名称 |
POLARIZATION BEARING DETECTION TYPE TWO-DIMENSIONAL LIGHT RECEPTION TIMING DETECTING DEVICE AND SURFACE SHAPE MEASURING DEVICE USING IT |
摘要 |
<p>The detection light of polarization bearing is synchronized with slit light scanning so as to two-dimensionally record the polarization bearing using a pair of analyzers (5,6) and storage type image detectors (7,8) that are in crossed Nicols arrangement. An independent claim is also included for surface shape measuring device.</p> |
申请公布号 |
EP1482273(A1) |
申请公布日期 |
2004.12.01 |
申请号 |
EP20030707195 |
申请日期 |
2003.03.03 |
申请人 |
TAKAOKA ELECTRIC MFG. CO., LTD. |
发明人 |
ISHIHARA, MITSUHIRO |
分类号 |
G01B11/24;G01B11/25;G01J4/04;(IPC1-7):G01B11/24 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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