Ink-jet printhead and method for manufacturing the same

摘要

An ink-jet printhead comprises an ink passage formed in the same plane as an ink chamber, a metallic nozzle plate disposed on a substrate, a heat dissipating layer formed of a metallic material, and a heater and conductor disposed between passivation layers of a nozzle plate. An ink-jet printhead comprises a substrate (100), an ink chamber (106) to be filled with ink and formed on the substrate surface, a manifold that supplies ink to the ink chamber formed on a rear surface of the substrate, and an ink passage connecting the ink chamber and the manifold and formed parallel to the substrate surface; a nozzle plate (120) including passivation layers stacked on the substrate and formed of an insulating material, and a heat dissipating layer (128) formed of a metallic material having good thermal conductivity and through which a nozzle connected to the ink chamber is formed; and a heater and a conductor disposed between the passivation layers of the nozzle plate. The heater (108) is positioned on the ink chamber and heats ink in the chamber. The conductor applies a current to the heater. An independent claim is also included for a method of manufacturing an ink-jet printhead comprising forming a sacrificial layer on a substrate surface, stacking passivation layers on the substrate and forming a heater and conductor connected to the heater between the passivation layers, forming a heat dissipating layer of metal on the passivation layers and forming a nozzle to expose the sacrificial layer; forming a manifold on a rear surface of the substrate; removing the sacrificial layer to form an ink chamber and ink passage; and connecting the manifold and ink passage.