Optical component and laser irradiation apparatus

摘要

It is an object of the present invention to provide a laser irradiation apparatus and an optical component used therein which can prevent the interference between the incident light and the reflected light from the rear surface of the substrate to be processed and which can suppress the damage of the optical component due to the reflected light. The present invention provides an optical component for fixing a lens comprising a base, a holder, and a fastener. The base has a concave side surface and at least one first hole. The holder has a cylindrical shape and has a second hole penetrating through a center portion of at least one of the top surface and the bottom surface thereof. The lens is sandwiched between the holder and the part of the base which extends from the edge of the side surface to the inner side and which corresponds to the inner part of a circle drawn so as to circumscribe all the insertion holes. The base and the holder are fastened by the fasteners inserted in the first insertion hole and the second insertion hole.