ELECTROSTATIC MECHANICALLY ACTUATED FLUID MICRO METERING DEVICE

摘要

An electrostatic mechanically actuated micro-metering device having an arr ay of fluid chambers with orifices for ejecting fluid is designed, such that th e pitch of the chamber array is independent from length and height dimensions of the actuating membrane that comprises a chamber wall, resulting i:n a higher resolution without requiring a substantially exponential increase in the applied voltage.