发明名称 Semiconductor memory device and method of manufacturing same
摘要 A semiconductor memory device and a method of manufacturing same, wherein landing pads are formed to contact source/drain regions of an access transistor in a memory cell array area and a first resistor device is formed in the peripheral circuit area, by depositing a first conductive layer on a semiconductor substrate having an access transistor formed thereon and patterning the first conductive layer. An interlayer insulation layer is deposited on the resultant structure, and a lower electrode and a dielectric layer having a high dielectric constant of a capacitor are formed to contact the source/drain region of the access transistor. By depositing a second conductive layer on the resultant structure having the dielectric layer and patterning the dielectric layer, a capacitor upper electrode is formed in the memory cell array area and a second resistor device is formed in the peripheral circuit area.
申请公布号 US6825091(B2) 申请公布日期 2004.11.30
申请号 US20030369717 申请日期 2003.02.21
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BAE KI-SOON;LEE HOON-CHI
分类号 H01L27/10;H01L21/8242;H01L27/108;(IPC1-7):H01L21/20 主分类号 H01L27/10
代理机构 代理人
主权项
地址
您可能感兴趣的专利